A CMOS MEMS Humidity Sensor Enhanced by a Capacitive Coupling Structure
نویسندگان
چکیده
منابع مشابه
A CMOS MEMS Humidity Sensor Enhanced by a Capacitive Coupling Structure
A capacitive coupling structure is developed to improve the performances of a capacitive complementary metal oxide semiconductor (CMOS) microelectromechanical system (MEMS) humidity sensor. The humidity sensor was fabricated by a post-CMOS process. Silver nanowires were dispersed onto the top of a conventional interdigitated capacitive structure to form a coupling electrode. Unlike a convention...
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ژورنال
عنوان ژورنال: Micromachines
سال: 2016
ISSN: 2072-666X
DOI: 10.3390/mi7050074